Turbo Pumping Systems
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Turbomolecular
pumping systems are the most reliable and cost-effective means of producing
high vacuum. They are portable, fast-starting, and require little in the
way of support systems. Varian offers many choices of turbomolecular pumping systems, with pumping speeds from 40 to 1000 liters per second. The systems are fully assembled on either roll-around carts or rugged stationary platforms. All pumps have silicon-nitride ceramic bearings for a long, clean, and virtually maintenance-free life. We offer standard turbomolecular pumps in addition to the wide-range Varian MacroTorr pumps for more demanding applications. |
Varian
MacroTorr pumps deliver the highest speed/compression-ratio performance
in the smallest envelope. These are true wide-range pumps, capable of
operating at higher foreline pressures than standard turbomolecular pumps.
They can be used in conjunction with dry scroll, or diaphragm backing
pumps, yielding a totally hydrocarbon-free pumping system. Our turbopump controllers are microprocessor-based frequency converters with self-diagnostic and protection features to insure the highest degree of reliability. They display all of the relevant operating parameters and pump status information. |
Others
Varian Products:
• 959
Manual Portable Helium Leak Detector
• 979 Automatic
Portable Helium Leak Detector
• 990 Component
Helium Leak Detector
• 947
/ 948 High Production Helium Leak Detector
• Helitest
Sniffer Leak Detector
• Helitest
Rack Sniffer Leak Detector
• Helitest
GEN Sniffer Leak Detector
• Helitest
WING
• Vacuum
Pumps
• Others
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